Method and apparatus for an improved baffle plate in a plasma processing system

ABSTRACT

The present invention presents an improved baffle plate for a plasma processing system, wherein the design and fabrication of the baffle plate advantageously provides for a uniform processing plasma in the process space with substantially minimal erosion of the baffle plate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.10/259,382 filed Sep. 30, 2002. The entire contents of this applicationare incorporated herein by reference. This application is related toco-pending U.S. patent application Ser. No. 10/259,858, entitled “Methodand apparatus for an improved upper electrode plate with depositionshield in a plasma processing system”, Attorney docket no. 226272US6YA,filed on Sep. 30, 2002; co-pending U.S. patent application Ser. No.10/259,757, entitled “Method and apparatus for an improved upperelectrode plate in a plasma processing system”, Attorney docket no.225277US6YA, filed on Sep. 30, 2002; co-pending U.S. patent applicationSer. No. 10/259,380, entitled “Method and apparatus for an improvedbaffle plate in a plasma processing system”, Attorney docket no. 228411US6YA, filed on Sep. 30, 2002; co-pending U.S. patent application Ser.No. 10/259,353, entitled “Method and apparatus for an improveddeposition shield in a plasma processing system”, Attorney docket no.226275US6YA, filed on Sep. 30, 2002; co-pending U.S. patent applicationSer. No. 10/259,352, entitled “Method and apparatus for an improvedoptical window deposition shield in a plasma processing system”,Attorney docket no. 226276US6YA, filed on Sep. 30, 2002; and co-pendingU.S. patent application Ser. No. 10/259,306, entitled “Method andapparatus for an improved bellows shield in a plasma processing system”,Attorney docket no. 226277US6YA, filed on Sep. 30, 2002. The entirecontents of all of those applications are herein incorporated byreference in their entirety.

FIELD OF THE INVENTION

The present invention relates to an improved component for a plasmaprocessing system and, more particularly, to a baffle plate employed ina plasma processing system surrounding a substrate holder.

BACKGROUND OF THE INVENTION

The fabrication of integrated circuits (IC) in the semiconductorindustry typically employs plasma to create and assist surface chemistrywithin a plasma reactor necessary to remove material from and depositmaterial to a substrate. In general, plasma is formed within the plasmareactor under vacuum conditions by heating electrons to energiessufficient to sustain ionizing collisions with a supplied process gas.Moreover, the heated electrons can have energy sufficient to sustaindissociative collisions and, therefore, a specific set of gases underpredetermined conditions (e.g., chamber pressure, gas flow rate, etc.)are chosen to produce a population of charged species and chemicallyreactive species suitable to the particular process being performedwithin the chamber (e.g., etching processes where materials are removedfrom the substrate or deposition processes where materials are added tothe substrate).

Although the formation of a population of charged species (ions, etc.)and chemically reactive species is necessary for performing the functionof the plasma processing system (i.e. material etch, materialdeposition, etc.) at the substrate surface, other component surfaces onthe interior of the processing chamber are exposed to the physically andchemically active plasma and, in time, can erode. The erosion of exposedcomponents in the plasma processing system can lead to a gradualdegradation of the plasma processing performance and ultimately tocomplete failure of the system.

In order to minimize the damage sustained by exposure to the processingplasma, components of the plasma processing system, known to sustainexposure to the processing plasma, are coated with a protective barrier.For example, components fabricated from aluminum can be anodized toproduce a surface layer of aluminum oxide, which is more resistant tothe plasma. In another example, a consumable or replaceable component,such as one fabricated from silicon, quartz, alumina, carbon, or siliconcarbide, can be inserted within the processing chamber to protect thesurfaces of more valuable components that would impose greater costsduring frequent replacement. Furthermore, it is desirable to selectsurface materials that minimize the introduction of unwantedcontaminants, impurities, etc. to the processing plasma and possibly tothe devices formed on the substrate.

In both cases, the inevitable failure of the protective coating, eitherdue to the integrity of the protective barrier or the integrity of thefabrication of the protective barrier, and the consumable nature of thereplaceable components demands frequent maintenance of the plasmaprocessing system. This frequent maintenance can produce costsassociated with plasma processing down-time and new plasma processingchamber components, which can be excessive.

SUMMARY OF THE INVENTION

The present invention provides an improved baffle plate for a plasmaprocessing system, wherein the design and fabrication of the baffleplate advantageously addresses the above-identified shortcomings.

It is an object of the present invention to provide a baffle platecomprising a ring having an upper surface, a lower surface, an innerradial edge, and an outer radial edge. The upper surface can furthercomprise a first mating surface proximate the outer radial edge. Thelower surface can further comprise a second mating surface proximate theouter radial edge and a plurality of fastener mating surfaces proximatethe inner radial edge. The baffle plate can further comprise at leastone passageway coupled to the upper surface and to the lower surface,and configured to permit the flow of gas therethrough, wherein the atleast one passageway can comprise an inner passageway surface.

It is an object of the present invention to further provide a baffleplate comprising a plurality of fastening receptors, each fasteningreceptor coupled to the upper surface and the lower surface, andconfigured to receive fastening devices to couple the baffle plate tothe plasma processing system. Each fastening receptor can comprise anentrant cavity, an exit through-hole, and an inner receptor surface.

It is an object of the present invention to further provide a baffleplate comprising a plurality of mounting through-holes, each mountingthrough-hole coupled to the upper surface and the lower surface, andconfigured to receive fastening devices to couple the baffle plate tothe plasma processing system.

It is an object of the present invention that the baffle plate furthercomprises a protective barrier formed on exposed surfaces of the baffleplate facing the processing plasma.

It is a further object of the present invention that the exposedsurfaces of the baffle plate comprise the upper surface of the baffleplate excluding the first mating surface; the lower surface of thebaffle plate excluding the plurality of fastener mating surfaces and thesecond mating surface; and the inner passageway surface contiguous withthe upper surface and the lower surface. The present inventionoptionally can include also identifying the first entrant surface ofeach of the plurality of fastening receptors and the first lip surfaceof each of the plurality of fastening receptors as exposed surfaces.

The present invention further provides a method of producing the baffleplate in the plasma processing system comprising the steps: fabricatingthe baffle plate; anodizing the baffle plate to form a surfaceanodization layer on the baffle plate; machining exposed surfaces on thebaffle plate to remove the surface anodization layer; and forming aprotective barrier on the exposed surfaces.

The present invention provides another method of producing the baffleplate in the plasma processing system comprising the steps: fabricatingthe baffle plate; masking exposed surfaces on the baffle plate toprevent formation of a surface anodization layer; anodizing the baffleplate to form the surface anodization layer on the baffle plate;unmasking the exposed surfaces; and forming a protective barrier on theexposed surfaces.

The present invention provides another method of producing the baffleplate in the plasma processing system comprising the steps: fabricatingthe baffle plate; and forming a protective barrier on a plurality ofexposed surfaces.

The present invention may also include a process of combining machiningand masking to prepare the exposed surfaces to receive the protectivebarrier, and then forming the protective barrier on the exposedsurfaces. For example, two of the exposed surfaces can be masked priorto anodizing, and two of the surfaces can be machined after anodizing tocreate four exposed surfaces on which the protective barrier can beformed.

Any of the above methods may also optionally include machining anodized(or otherwise coated) surfaces that are not exposed surfaces (e.g., toobtain a bare metal connection where the machined surface will mate withanother part).

BRIEF DESCRIPTION OF THE DRAWINGS

These and other advantages of the invention will become more apparentand more readily appreciated from the following detailed description ofthe exemplary embodiments of the invention taken in conjunction with theaccompanying drawings, where:

FIG. 1 shows a simplified block diagram of a plasma processing systemcomprising a baffle plate according to an embodiment of the presentinvention;

FIG. 2 shows a plan view of a baffle plate for a plasma processingsystem according to an embodiment of the present invention;

FIG. 3 shows a cross sectional view of a baffle plate for a plasmaprocessing system according to an embodiment of the present invention;

FIG. 4 shows an expanded cross sectional view taken along aminor axis ofone passageway formed within a baffle plate for a plasma processingsystem according to an embodiment of the present invention;

FIG. 5A shows an expanded view of one passageway formed within an uppersurface of a baffle plate for a plasma processing system according to anembodiment of the present invention;

FIG. 5B shows an expanded cross sectional view taken along a major axisof one passageway formed within a baffle plate for a plasma processingsystem according to an embodiment of the present invention;

FIG. 5C shows an expanded view of one passageway formed within a lowersurface of a baffle plate for a plasma processing system according to anembodiment of the present invention;

FIG. 6 presents an expanded view of an inner radial edge of a baffleplate for a plasma processing system according to an embodiment of thepresent invention;

FIG. 7 presents an expanded view of an outer radial edge of a baffleplate for a plasma processing system according to an embodiment of thepresent invention;

FIG. 8 presents a method of producing a baffle plate for a plasmaprocessing system according to an embodiment of the present invention;

FIG. 9 presents a method of producing a baffle plate for a plasmaprocessing system according to another embodiment of the presentinvention; and

FIG. 10 presents a method of producing a baffle plate for a plasmaprocessing system according to another embodiment of the presentinvention.

DETAILED DESCRIPTION OF AN EMBODIMENT

According to an embodiment of the present invention, a plasma processingsystem 1 is depicted in FIG. 1 comprising a plasma processing chamber10, an upper assembly 20, an upper electrode 22, a substrate holder 30for supporting a substrate 35, and a pumping duct 40 coupled to a vacuumpump (not shown) for providing a reduced pressure atmosphere 11 inplasma processing chamber 10. Plasma processing chamber 10 canfacilitate the formation of a processing plasma in process space 12adjacent substrate 35. The plasma processing system 1 can be configuredto process 200 mm substrates, 300 mm substrates, or larger.

In the illustrated embodiment, upper electrode 22 comprises an electrodeplate 24 (FIG. 1) with a deposition shield 26 (FIG. 1). In an alternateembodiment, upper assembly 20 can comprise at least one of a cover, agas injection assembly, and an upper electrode impedance match network.For example, the upper electrode 22 can be coupled to an RF source. Inanother alternate embodiment, the upper assembly 20 comprises a covercoupled to the upper electrode 22, wherein the upper electrode 22 ismaintained at an electrical potential equivalent to that of the plasmaprocessing chamber 10. For example, the plasma processing chamber 10,the upper assembly 20, and the upper electrode 22 can be electricallyconnected to ground potential.

Plasma processing chamber 10 can, for example, further comprise anoptical viewport 16 coupled to the deposition shield 26 of upperelectrode 22. Optical viewport 16 can comprise an optical window 17coupled to the backside of an optical window deposition shield 18, andan optical window flange 19 can be configured to couple optical window17 to the optical window deposition shield 18. Sealing members, such asO-rings, can be provided between the optical window flange 19 and theoptical window 17, between the optical window 17 and the optical windowdeposition shield 18, and between the optical window deposition shield18 and the plasma processing chamber 10. Optical viewport 16 can, forexample, permit monitoring of optical emission from the processingplasma in process space 12.

Substrate holder 30 can, for example, further comprise a verticaltranslational device 50 surrounded by a bellows 52 coupled to thesubstrate holder 30 and the plasma processing chamber 10, and configuredto seal the vertical translational device 50 from the reduced pressureatmosphere 11 in plasma processing chamber 10. Additionally, a bellowsshield 54 can, for example, be coupled to the substrate holder 30 andconfigured to protect the bellows 52 from the processing plasma.Substrate holder 10 can, for example, further be coupled to at least oneof a focus ring 60, and a shield ring 62. Furthermore, a baffle plate 64can extend about a periphery of the substrate holder 30.

Substrate 35 can be, for example, transferred into and out of plasmaprocessing chamber 10 through a slot valve (not shown) and chamberfeed-through (not shown) via robotic substrate transfer system where itis received by substrate lift pins (not shown) housed within substrateholder 30 and mechanically translated by devices housed therein. Oncesubstrate 35 is received from substrate transfer system, it is loweredto an upper surface of substrate holder 30.

Substrate 35 can be, for example, affixed to the substrate holder 30 viaan electrostatic clamping system. Furthermore, substrate holder 30 can,for example, further include a cooling system including a re-circulatingcoolant flow that receives heat from substrate holder 30 and transfersheat to a heat exchanger system (not shown), or when heating, transfersheat from the heat exchanger system. Moreover, gas can, for example, bedelivered to the back-side of substrate 35 via a backside gas system toimprove the gas-gap thermal conductance between substrate 35 andsubstrate holder 30. Such a system can be utilized when temperaturecontrol of the substrate is required at elevated or reducedtemperatures. In other embodiments, heating elements, such as resistiveheating elements, or thermoelectric heaters/coolers can be included.

In the illustrated embodiment, shown in FIG. 1, substrate holder 30 cancomprise an electrode through which RF power is coupled to theprocessing plasma in process space 12. For example, substrate holder 30can be electrically biased at a RF voltage via the transmission of RFpower from a RF generator (not shown) through an impedance match network(not shown) to substrate holder 30. The RF bias can serve to heatelectrons to form and maintain plasma. In this configuration, the systemcan operate as a reactive ion etch (RIE) reactor, wherein the chamberand upper gas injection electrode serve as ground surfaces. A typicalfrequency for the RF bias can range from 1 MHz to 100 MHz and ispreferably 13.56 MHz. RF systems for plasma processing are well known tothose skilled in the art.

Alternately, the processing plasma formed in process space 12 can beformed using a parallel-plate, capacitively coupled plasma (CCP) source,an inductively coupled plasma (ICP) source, any combination thereof, andwith and without magnet systems. Alternately, the processing plasma inprocess space 12 can be formed using electron cyclotron resonance (ECR).In yet another embodiment, the processing plasma in process space 12 isformed from the launching of a Helicon wave. In yet another embodiment,the processing plasma in process space 12 is formed from a propagatingsurface wave.

Referring now to an illustrated embodiment of the present inventiondepicted in FIG. 2 (plan view) and FIG. 3 (cross sectional view), baffleplate 64 can form a ring comprising an upper surface 82, a lower surface84, an inner radial edge 86, and an outer radial edge 88. The baffleplate 64 can further comprise at least one passageway 90 coupled to theupper surface 82 and to the lower surface 84, and configured to permitthe flow of gas therethrough.

FIG. 4 provides an expanded view of one of the passageways 90, whereinthe expanded view provides a transverse cross sectional view taken alongaminor axis of the passageway 90. Each passageway 90 comprises an innerpassageway surface 92 contiguous with the upper surface 82 and the lowersurface 84 of the baffle plate 64. For example, at least one passageway90 can comprise a length, dictated by the distance between the uppersurface 82 and the lower surface 84 proximate each passageway 90, havinga dimensional range from 1 to 50 mm. Desirably, the length comprises adimensional range from 1 to 10 mm, and preferably the length is at least5 mm.

FIGS. 5A, 5B, and 5C provide an exemplary cross-sectional view ofpassageway 90 at the upper surface 82 of baffle plate 64, an additionalexpanded cross-sectional view of passageway 90 taken along a major axisof the passageway 90, and an exemplary cross-sectional view ofpassageway 90 at the lower surface 84 of baffle plate 64, respectively.

In the illustrated embodiment shown in FIG. 1 and FIG. 5B, the at leastone passageway 90 can comprise slots aligned in a radial direction. Inan alternate embodiment of the present invention, the slots can bealigned in an azimuthal direction. In an alternate embodiment of thepresent invention, the slots can be slanted and, therefore, alignedpartially in a radial direction and an azimuthal direction. In analternate embodiment, the passageways 90 can comprise a combination ofalignment methodologies thereof. Alternately, the passageways caninclude at least one orifice.

Additionally, referring now to FIG. 5A and FIG. 5B, the cross sectionalview of the passageway 90 at the upper surface 82 comprises a crosssectional entrance area 91 a that is greater than the respective crosssectional exit area 91 b depicted in the cross sectional view of thepassageway 90 at the lower surface 84. Alternately, the cross sectionalarea can be, for example, constant along the length of the passagewayfrom the upper surface 82 to the lower surface 84. Alternately, thecross-sectional exit area 91 b of the passageway 90 at the lower surface84 can, for example, comprise a cross-sectional area greater than therespective cross-sectional entrance area 91 a of the passageway 90 atthe upper surface 82.

Still referring to FIG. 5B and again to FIG. 2, baffle plate 64 can, forexample, further comprise a plurality of fastening receptors 100. Eachfastening receptor 100 can be coupled to the upper surface 82 and thelower surface 84, and configured to receive fastening devices (notshown) (such as bolts) to couple baffle plate 64 to substrate holder 30.The fastening receptors 100 can comprise a first entrant cavity 102, asecond entrant cavity 103, and an exit through-hole 104. Alternately,second entrant cavity 103 is not required. For example, the number offastening receptors 100 formed within baffle plate 64 can range from 0to 100. Desirably, the number of fastening receptors 100 ranges from 5to 20; and, preferably, the number of fastening receptors 100 equals 12fastening receptors.

FIG. 6 depicts an expanded cross sectional view of the inner radial edge86 of baffle plate 64 comprising one of the plurality of fasteningreceptors 100. The inner radial edge 86 can further comprise an inneredge surface 112 and a plurality of fastener mating surfaces 113. Theinner edge surface 112 can be coupled to the upper surface 82 and thelower surface 84 of baffle plate 64. At least one of the fastener matingsurfaces 113 can be coupled to and coincident with the lower surface 84of baffle plate 64 and configured to mate the baffle plate 64 withsubstrate holder 30. Furthermore, as shown in FIG. 6, the fasteningreceptor 100 can include an inner receptor surface 106 that can furthercomprise a first entrant surface 107, a first lip surface 108, a secondentrant surface 109, a second lip surface 110, and an exit surface 111.For example, the inner radial edge 86 can comprise a minimum thickness,dictated by a distance between the upper surface 82 and the lowersurface 84 proximate the inner radial edge 86, having a dimensionalrange from 1 to 50 mm. Desirably, the minimum thickness comprises adimensional range from 1 to 10 mm, and preferably the minimum thicknessis at least 2 mm.

FIG. 7 provides an expanded cross sectional view of the outer radialedge 88 of baffle plate 64. The outer radial edge 88 can furthercomprise an outer edge surface 114, a first mating surface 116, and asecond mating surface 118. The outer edge surface 114 can be coupled tothe upper surface 82 and the lower surface 84 of baffle plate 64. Thefirst mating surface 116 can be coupled to and coincident with a portionof the upper surface 82, and configured to mate with plasma processingsystem 1. The second mating surface 118 can be coupled to and coincidentwith a portion of the lower surface 84, and configured to mate withplasma processing system 1. For example, first and second matingsurfaces can be used to mate baffle plate 64 with at least one of adeposition shield 14 and a plasma processing chamber 10. Additionally,for example, the outer radial edge 88 can comprise a thickness, dictatedby the distance between the first mating surface 116 and the secondmating surface 118 proximate the outer radial edge 88, having adimensional range from 1 to 50 mm. Desirably, the thickness comprises adimensional range from 1 to 10 mm, and preferably the thickness is atleast 7 mm.

Additionally, as shown in FIG. 2, baffle plate 64 can, for example,further comprise a plurality of mounting through-holes 101. Eachmounting through-hole 101 can be coupled to the upper surface 82 and thelower surface 84, and configured to receive fastening devices (notshown) (such as bolts) to couple baffle plate 64 to at least one of theplasma processing chamber 10 and the deposition shield 26 of the upperelectrode 22. For example, the number of mounting through-holes 101formed within baffle plate 64 can range from 0 to 100. Desirably, thenumber of mounting through-holes 101 ranges from 5 to 20; and,preferably, the number of mounting through-holes 101 is at least 10.

Referring now to FIGS. 2 through 7, the baffle plate 64 furthercomprises a protective barrier 150 formed on a plurality of exposedsurfaces 145 of the baffle plate 64. In an embodiment of the presentinvention, the exposed surfaces 145 can comprise the upper surface 82 ofbaffle plate 64 excluding the first mating surface 116; the lowersurface 84 of baffle plate 64 excluding the plurality of fastener matingsurfaces 113 and the second mating surface 118; and the inner passagewaysurface 92 contiguous with the upper surface 82 and the lower surface84. Additionally, the exposed surfaces 145 can comprise the firstentrant surface 107 of each of the plurality of fastening receptors 100;and the first lip surface 108 of each of the plurality of fasteningreceptors 100. Alternately, the exposed surfaces comprise all surfaceson the baffle plate 64.

In an embodiment of the present invention, the protective barrier 150can comprise a compound including an oxide of aluminum such as Al₂O₃. Inanother embodiment of the present invention, the protective barrier 150can comprise a mixture of Al₂O₃ and Y₂O₃. In another embodiment of thepresent invention, the protective barrier 150 can comprise at least oneof a III-column element (column III of periodic table) and a Lanthanonelement. In another embodiment of the present invention, the III-columnelement can comprise at least one of Yttrium, Scandium, and Lanthanum.In another embodiment of the present invention, the Lanthanon elementcan comprise at least one of Cerium, Dysprosium, and Europium. Inanother embodiment of the present invention, the compound formingprotective barrier 150 can comprise at least one of Yttria (Y₂O₃),Sc₂O₃, Sc₂F₃, YF₃, La₂O₃, CeO₂, Eu₂O₃, and DyO₃.

In an embodiment of the present invention, the protective barrier 150formed on baffle plate 64 comprises a thermal sprayed coating having aminimum thickness, wherein the minimum thickness can be allowed to varyacross the plurality of exposed surfaces 145. In other words, thespecified thickness can be variable across the exposed surfaces 145. Forexample, the minimum thickness can be constant over a first portion ofthe exposed surfaces 145 and variable over a second portion of theexposed surfaces 145. For example, a variable thickness can occur on acurved surface, on a corner, or in a hole. The minimum thickness rangesfrom 0 micron to 550 micron. Desirably, the minimum thickness rangesfrom 50 micron to 250 micron; and, preferably, the minimum thicknessranges from 150 micron to 250 micron.

FIG. 8 presents a method of producing the baffle plate 64 in the plasmaprocessing system described in FIG. 1 according to an embodiment of thepresent invention. A flow diagram 300 begins in 310 with fabricating thebaffle plate 64 (e.g., a baffle plate having the characteristics of theplate described with reference to FIGS. 2-7). Fabricating the baffleplate can comprise at least one of machining, casting, polishing,forging, and grinding. For example, each of the elements described abovecan be machined according to specifications set forth on a mechanicaldrawing, using conventional techniques including a mill, a lathe, etc.The techniques for machining a component using, for example, a mill or alathe, are well known to those skilled in the art of machining. Thebaffle plate can, for example, be fabricated from aluminum.

In 320, the baffle plate is anodized to form a surface anodizationlayer. For example, when fabricating the baffle plate from aluminum, thesurface anodization layer comprises aluminum oxide (Al₂O₃). Methods ofanodizing aluminum components are well known to those skilled in the artof surface anodization.

In 330, the surface anodization layer is removed from the exposedsurfaces 145 using standard machining techniques. During the samemachining step, or during a separate machining step, other surfaces(e.g., the first mating surface of the upper surface, the second matingsurface of the lower surface, and the plurality of fastener matingsurfaces of the lower surface) may also be machined (e.g., to produce aflat or bare surface that provides at least one of a good mechanical orelectrical contact at the machined surface).

In 340, the protective barrier 150 is formed on the exposed surfaces145. A protective barrier 150 comprising, for example Yftria, can beformed using (thermal) spray coating techniques that are well known tothose skilled in the art of ceramic spray coatings. In an alternateembodiment, forming the protective barrier can further comprisepolishing the thermal spray coating. For example, polishing the thermalspray coating can comprise the application of sand paper to the sprayedsurfaces.

FIG. 9 presents a method of producing the baffle plate in the plasmaprocessing system described in FIG. 1 according to another embodiment ofthe present invention. A flow diagram 400 begins in 410 with fabricatingthe baffle plate 64 (e.g., a baffle plate having the characteristics ofthe plate described with reference to FIGS. 2-7). Fabricating the baffleplate can comprise at least one of machining, casting, polishing,forging, and grinding. For example, each of the elements described abovecan be machined according to specifications set forth on a mechanicaldrawing, using conventional techniques including a mill, a lathe, etc.The techniques for machining a component using, for example, a mill or alathe, are well known to those skilled in the art of machining. Thebaffle plate can, for example, be fabricated from aluminum.

In 420, exposed surfaces 145 are masked to prevent the formation of asurface anodization layer thereon. Techniques for surface masking andunmasking are well known to those skilled in the art of surface coatingsand surface anodization. During the same masking step, or during aseparate masking step, other surfaces (e.g., the first mating surface ofthe upper surface, the second mating surface of the lower surface, andthe plurality of fastener mating surfaces of the lower surface) may alsobe masked (e.g., to maintain a flat or bare surface that provides atleast one of a good mechanical or electrical contact at the machinedsurface).

In 430, the baffle plate is anodized to form a surface anodization layeron the remaining unmasked surfaces. For example, when fabricating thebaffle plate from aluminum, the surface anodization layer can comprisealuminum oxide (Al₂O₃). Methods of anodizing aluminum components arewell known to those skilled in the art of surface anodization.

In 440, the protective barrier 150 is formed on the exposed surfaces. Aprotective barrier comprising, for example Yttria, can be formed using(thermal) spray coating techniques that are well known to those skilledin the art of ceramic spray coatings. In an alternate embodiment,forming the protective barrier can further comprise polishing thethermal spray coating. For example, polishing the thermal spray coatingcan comprise the application of sand paper to the sprayed surfaces.

FIG. 10 presents a method of producing the baffle plate in the plasmaprocessing system described in FIG. 1 according to another embodiment ofthe present invention. A flow diagram 500 begins in 510 with fabricatingthe baffle plate 64 (e.g., a baffle plate having the characteristics ofthe plate described with reference to FIGS. 2-7). Fabricating the baffleplate can comprise at least one of machining, casting, polishing,forging, and grinding. For example, each of the elements described abovecan be machined according to specifications set forth on a mechanicaldrawing, using conventional techniques including a mill, a lathe, etc.The techniques for machining a component using, for example, a mill or alathe, are well known to those skilled in the art of machining. Thebaffle plate can, for example, be fabricated from aluminum.

In 520, a protective barrier 150 is formed on exposed surfaces 145 ofthe baffle plate 64. A protective barrier comprising, for exampleYttria, can be formed using (thermal) spray coating techniques that arewell known to those skilled in the art of ceramic spray coatings. In analternate embodiment, forming the protective barrier can furthercomprise polishing the thermal spray coating. For example, polishing thethermal spray coating can comprise the application of sand paper to thesprayed surfaces.

The processes of forming a protective barrier 150 on the exposedsurfaces 145, described with reference to FIGS. 8-10 can be modified toutilize a combination of machining and masking. In such a modifiedprocess, at least one exposed surface is masked to prevent formation ofthe anodization layer thereon while other exposed surfaces are anodized.The exposed surfaces that are unmasked are then machined, and theexposed surfaces that were masked are unmasked. The protective barrier150 can then be formed on all the exposed surfaces. As described above,additional surfaces that are not exposed surfaces may also be machinedduring the method (e.g., in order to provide a better mechanical orelectrical contact than would be formed with the anodization layerthereon.

Although only certain exemplary embodiments of this invention have beendescribed in detail above, those skilled in the art will readilyappreciate that many modifications are possible in the exemplaryembodiments without materially departing from the novel teachings andadvantages of this invention. Accordingly, all such modifications areintended to be included within the scope of this invention.

1. An improved baffle plate in a plasma processing system comprising: aring comprising an upper surface, a lower surface, an inner radial edgecoupled to said upper surface and said lower surface, an outer radialedge coupled to said upper surface and said lower surface, and at leastone passageway coupled to said upper surface and to said lower surfaceand configured to permit the flow of a gas therethrough, wherein saidupper surface comprises a first mating surface proximate said outerradial edge, said lower surface comprises a second mating surfaceproximate said outer radial edge and a plurality of fastener matingsurfaces proximate said inner radial edge, and each of said at least onepassageway comprises an internal passageway surface, and wherein saidring further comprises at least one of a plurality of fasteningreceptors and a plurality of mounting through-holes coupled to saidupper surface and said lower surface of said baffle plate and configuredto receive fastening devices in order to couple said baffle plate tosaid plasma processing system.
 2. The improved baffle plate as recitedin claim 1, wherein at least one of said plurality of fasteningreceptors comprises an entrant cavity, an exit through-hole, and aninner receptor surface.
 3. The improved baffle plate as recited in claim2, wherein said inner receptor surface of at least one of said pluralityof fastening receptors comprises a first entrant surface, a first lipsurface, a second entrant surface, a second lip surface, and an exitsurface.
 4. The improved baffle plate as recited in claim 3, whereinsaid plurality of exposed surfaces further comprises said first entrantsurface and said first lip surface.